ITEM

Rank

S

Y

A

B

C

D

E

F

G

H

I

Design Rule

(um)

＞5

2-5

1-2

1

0.8

0.5

0.35

0.25

0.18

0.15

0.13

CD Tolerance

(±um)

±0.5

±0.3

±0.2

±0.15

±0.1

±0.075

±0.05

±0.04

±0.03

±0.025

±0.02

CD Range

(um)

≤0.5

≤0.3

≤0.2

≤0.15

≤0.1

≤0.07

≤0.05

≤0.04

≤0.035

≤0.03

≤0.025

CD mean to target

(um)

±0.5

±0.3

±0.2

±0.15

±0.1

±0.07

±0.04

±0.03

≤0.03

±0.02

±0.02

Registration & Overlay

Based on the 1st layer(um)

±0.5

±0.3

±0.2

±0.15

±0.12

±0.10

±0.07

±0.05

≤0.04

±0.03

±0.02

Defect

Defect size(um)

＜4

＜2

＜1.0

＜1.0

＜0.75

＜0.5

＜0.4

＜0.3

＜0.3

＜0.25

＜0.20